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Glatzel, H. ; Wittmaack, K.

Peak position and width of the energy distribution of ion beams extracted from a plasma source.

Rev. Sci. Instruments 63, 2765-2767 (1992)
DOI
Open Access Green möglich sobald Postprint bei der ZB eingereicht worden ist.
Energy spectra of 1 keV He+ and Ar+ ion beams have been investigated using a sector field analyzer with a resolution ΔE/E<10-3. The ions were generated in a filament type plasma ion source with axial magnetic confinement. The energy spectra exhibited a unimodal, almost symmetrical peak. Width and position of the peak were measured as a function of the operating parameters of the ion source. The smallest energy spread of the ions was measured at relatively high source pressures and low magnetic field strength, in which case the full width at half-maximum of the peak was ΔE=1.5 eV. Correcting for the resolution of the analyzer, an energy spread of less than 1 eV thus appears to be achievable with the source employed in this study. Rather large peak shifts (up to 10 eV and more) were observed upon changing the axial magnetic field strength and the discharge current, the effect being much more pronounced for He than for Ar. By contrast, the peak position was almost independent of the applied discharge voltage, provided the terminal voltage was connected to the anode of the discharge. This implies that the zero point of the ion energy is closely related to the anode potential.
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Publikationstyp Artikel: Journalartikel
Dokumenttyp Wissenschaftlicher Artikel
Korrespondenzautor
ISSN (print) / ISBN 0034-6748
e-ISSN 1089-7623
Zeitschrift Review of Scientific Instruments
Quellenangaben Band: 63, Heft: 4, Seiten: 2765-2767 Artikelnummer: , Supplement: ,
Verlag American Institute of Physics (AIP)
Nichtpatentliteratur Publikationen
Begutachtungsstatus Peer reviewed
Institut(e) Institute of Radiation Protection (ISS)