Startseite
English
Erweiterte Suche
Durchblättern nach ...
Publikationen im Überblick
Ansprechpartner
Hilfe
DOI
 |
|
Open Access Green möglich sobald Postprint bei der ZB eingereicht worden ist.
Sensitive, small, broadband and scalable optomechanical ultrasound sensor in silicon photonics.
Nat. Photonics 15, 341–345 (2021)
Ultrasonography1 and photoacoustic2,3 (optoacoustic) tomography have recently seen great advances in hardware and algorithms. However, current high-end systems still use a matrix of piezoelectric sensor elements, and new applications require sensors with high sensitivity, broadband detection, small size and scalability to a fine-pitch matrix. This work demonstrates an ultrasound sensor in silicon photonic technology with extreme sensitivity owing to an innovative optomechanical waveguide. This waveguide has a tiny 15 nm air gap between two movable parts, which we fabricated using new CMOS-compatible processing. The 20 μm small sensor has a noise equivalent pressure below 1.3 mPa Hz−1/2 in the measured range of 3–30 MHz, dominated by acoustomechanical noise. This is two orders of magnitude better than for piezoelectric elements of an identical size4. The demonstrated sensor matrix with on-chip photonic multiplexing5–7 offers the prospect of miniaturized catheters that have sensor matrices interrogated using just a few optical fibres, unlike piezoelectric sensors that typically use an electrical connection for each element.
Altmetric
Weitere Metriken?
Zusatzinfos bearbeiten
[➜Einloggen]
Publikationstyp
Artikel: Journalartikel
Dokumenttyp
Wissenschaftlicher Artikel
Schlagwörter
Resonator; Detector
ISSN (print) / ISBN
1749-4885
e-ISSN
1749-4893
Zeitschrift
Nature Photonics
Quellenangaben
Band: 15,
Seiten: 341–345
Verlag
Nature Publishing Group
Verlagsort
Heidelberger Platz 3, Berlin, 14197, Germany
Nichtpatentliteratur
Publikationen
Begutachtungsstatus
Peer reviewed
Förderungen
Deutsche Forschungsgemeinschaft (DFG)