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Rosenthal, A. ; Omar, M. ; Estrada, H. ; Kellnberger, S. ; Razansky, D. ; Ntziachristos, V.

Embedded ultrasound sensor in a silicon-on-insulator photonic platform.

Appl. Phys. Lett. 104:021116 (2014)

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A miniaturized ultrasound sensor is demonstrated in a silicon-on-insulator platform. The sensor is based on a π-phase-shifted Bragg grating formed by waveguide corrugation. Ultrasound detection is performed by monitoring shifts in the resonance frequency of the grating using pulse interferometry. The device is characterized by measuring its response to a wideband acoustic point source generated using the optoacoustic effect. Experimental results show that the sensor's response is dominated by the formation of surface acoustic waves.

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