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Embedded ultrasound sensor in a silicon-on-insulator photonic platform.
Appl. Phys. Lett. 104:021116 (2014)
Publ. Version/Full Text Volltext
DOI
A miniaturized ultrasound sensor is demonstrated in a silicon-on-insulator platform. The sensor is based on a π-phase-shifted Bragg grating formed by waveguide corrugation. Ultrasound detection is performed by monitoring shifts in the resonance frequency of the grating using pulse interferometry. The device is characterized by measuring its response to a wideband acoustic point source generated using the optoacoustic effect. Experimental results show that the sensor's response is dominated by the formation of surface acoustic waves.
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Publication type
Article: Journal article
Document type
Scientific Article
Keywords
High-sensitivity; Microring Resonators; Optical-fiber; Interferometry; Film
ISSN (print) / ISBN
0003-6951
e-ISSN
1077-3118
Journal
Applied Physics Letters
Quellenangaben
Volume: 104,
Issue: 2,
Article Number: 021116
Publisher
American Institute of Physics (AIP)
Publishing Place
Melville
Non-patent literature
Publications
Reviewing status
Peer reviewed
Institute(s)
Institute of Biological and Medical Imaging (IBMI)