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Open Access Green as soon as Postprint is submitted to ZB.
Dynamic range of 106 in depth profiling using secondary-ion mass spectrometry.
Appl. Phys. Lett. 37, 285-287 (1980)
Limitations in dynamic range previously experienced in SIMS depth profiling are shown to be caused by neutral projectiles present in the primary ion beam. Dynamic ranges of about 106 can be achieved if (i) the final section of the primary beam line and the sample are immersed in a UHV ambient (<10-6 Pa) and (ii) the beam traversing this region is deflected or offset from the gun axis so that energetic neutrals produced in the beam line do not hit the sample.
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Publication type
Article: Journal article
Document type
Scientific Article
ISSN (print) / ISBN
0003-6951
e-ISSN
1077-3118
Journal
Applied Physics Letters
Quellenangaben
Volume: 37,
Issue: 3,
Pages: 285-287
Publisher
American Institute of Physics (AIP)
Non-patent literature
Publications
Reviewing status
Peer reviewed
Institute(s)
Physikalisch-Technische Abteilung