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Radiation-enhanced outdiffusion of xenon implanted in aluminum.

Appl. Phys. Lett. 31, 21-23 (1977)
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Entrapment of 10-160-keV xenon implanted under UHV conditions in polycrystalline aluminum has been investigated by Rutherford backscattering. The saturation xenon distributions were found to be strongly affected by radiation-enhanced outdiffusion. Different from silicon the loss of xenon from near-surface regions of aluminum increases with increasing ion energy. The results are explained in terms of spike-activated diffusion.
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Publication type Article: Journal article
Document type Scientific Article
Corresponding Author
ISSN (print) / ISBN 0003-6951
e-ISSN 1077-3118
Quellenangaben Volume: 31, Issue: 1, Pages: 21-23 Article Number: , Supplement: ,
Publisher American Institute of Physics (AIP)
Non-patent literature Publications
Reviewing status Peer reviewed
Institute(s) Physikalisch-Technische Abteilung