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Ionization mechanism of H+ sputtered from hydrogenated silicon.

Phys. Rev. Lett. 43, 872-875 (1979)
DOI
Open Access Green as soon as Postprint is submitted to ZB.
The emission of H+ sputtered from hydrogenated amorphous silicon has been studied for 3- to 30-keV noble-gas-ion bombardment. The results suggest that excited silicon atoms can be emitted as (Si2pH)+ molecules. Auger deexcitation in vacuum results in (SiH)2+ which disintegrates into Si+ and H+ with a corresponding gain in kinetic energy due to Coulomb explosion. Direct emission of H+ is important only at H+ energies > 30 eV or at bombardment energies <3 keV.
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Publication type Article: Journal article
Document type Scientific Article
Language english
Publication Year 1979
HGF-reported in Year 0
ISSN (print) / ISBN 0031-9007
e-ISSN 1079-7114
Quellenangaben Volume: 43, Issue: 12, Pages: 872-875 Article Number: , Supplement: ,
Publisher American Physical Society (APS)
Reviewing status Peer reviewed
Institute(s) Physikalisch-Technische Abteilung
Scopus ID 4243936906
Erfassungsdatum 1979-12-31