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    Ionization mechanism of H+ sputtered from hydrogenated silicon.
        
        Phys. Rev. Lett. 43, 872-875 (1979)
    
    
    
	    The emission of H+ sputtered from hydrogenated amorphous silicon has been studied for 3- to 30-keV noble-gas-ion bombardment. The results suggest that excited silicon atoms can be emitted as (Si2pH)+ molecules. Auger deexcitation in vacuum results in (SiH)2+ which disintegrates into Si+ and H+ with a corresponding gain in kinetic energy due to Coulomb explosion. Direct emission of H+ is important only at H+ energies > 30 eV or at bombardment energies <3 keV.
	
	
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        Publication type
        Article: Journal article
    
 
    
        Document type
        Scientific Article
    
 
     
    
     
     
    
    
        Language
        english
    
 
    
        Publication Year
        1979
    
 
     
    
        HGF-reported in Year
        0
    
 
    
    
        ISSN (print) / ISBN
        0031-9007
    
 
    
        e-ISSN
        1079-7114
    
 
    
     
     
	     
	 
	 
    
        Journal
        Physical Review Letters
    
 
	
    
        Quellenangaben
        
	    Volume: 43,  
	    Issue: 12,  
	    Pages: 872-875 
	    
	    
	
    
 
    
         
        
            Publisher
            American Physical Society (APS)
        
 
         
	
         
         
         
         
         
	
         
         
         
    
         
         
         
         
         
         
         
    
        Reviewing status
        Peer reviewed
    
 
    
        Institute(s)
        Physikalisch-Technische Abteilung
    
 
     
     
     
     
     	
    
    
        Scopus ID
        4243936906
    
    
        Erfassungsdatum
        1979-12-31