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Wittmaack, K.

Analytical description of the sputtering yields of silicon bombarded with normally incident ions.

Phys. Rev. B Condens. Matter 68, 235211/1-235211-11 (2003)

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Publication type Article: Journal article

Document type Scientific Article

Corresponding Author

ISSN (print) / ISBN 0163-1829

e-ISSN 1095-3795

Journal Physical Review B

Quellenangaben Volume: 68, Pages: 235211/1-235211-11

Publisher American Physical Society (APS)

Non-patent literature Publications

Reviewing status Peer reviewed